Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices
| Title: | Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices |
| Date: | 2004 |
| Citation: | Gruen, D. M., Busmann, H. G., Meyer, E. M., Auciello, O., Krauss, A. R., & Krauss, J. R. (2004). Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices. U.S. Patent No. 6,811,612. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1704 |
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