Methods for fabricating nanopores for single-electron devices

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Title:	Methods for fabricating nanopores for single-electron devices
Date:	2004
Citation:	Brousseau, L. C. (2004). Methods for fabricating nanopores for single-electron devices. U.S. Patent No. 6,673,717. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1713



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