Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices

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Title: Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices
Date: 2005
Citation: Basceri, C. (2005). Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices. U.S. Patent No. 6,887,521. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1716


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