Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices
No Thumbnail Available
Date
2005
Authors
Advisors
Journal Title
Series/Report No.
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Citation
Basceri, C. (2005). Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices. U.S. Patent No. 6,887,521. Washington, DC: U.S. Patent and Trademark Office.