Method for depositing in particular crystalline layers, and device for carrying out the method
| Title: | Method for depositing in particular crystalline layers, and device for carrying out the method |
| Date: | 2005 |
| Citation: | Bremser, M., Dauelsberg, M., & Strauch, G. K. (2005). Method for depositing in particular crystalline layers, and device for carrying out the method. U.S. Patent No. 6,972,050. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1718 |
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