Electrical device including dielectric layer formed by direct patterning process

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Title: Electrical device including dielectric layer formed by direct patterning process
Date: 2005
Citation: Gleason, K. K., Ober, C., & Herr, D. (2005). Electrical device including dielectric layer formed by direct patterning process. U.S. Patent No. 6,946,736. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1726


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