Patterning methods and systems using reflected interference patterns

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Title: Patterning methods and systems using reflected interference patterns
Date: 2005
Citation: Herr, D. J. C., & Joy, D. C. (2005). Patterning methods and systems using reflected interference patterns. U.S. Patent No. 6,967,067. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1727


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