Deterministically doped field-effect devices and methods of making same

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Title: Deterministically doped field-effect devices and methods of making same
Date: 2006
Citation: Herr, D. J. C., & Zhirnov, V. V. (2006). Deterministically doped field-effect devices and methods of making same. U.S. Patent No. 7,015,546. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1731


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