Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers, including such layers having a varied concentration of barium and strontium within the layer
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2006
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Basceri, C., & Alzola, N. (2006). Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers, including such layers having a varied concentration of barium and strontium within the layer. U.S. Patent No. 6,982,103. Washington, DC: U.S. Patent and Trademark Office.
