Methods of forming conductive material silicides by reaction of metal with silicon

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Title: Methods of forming conductive material silicides by reaction of metal with silicon
Date: 2006
Citation: Basceri, C. (2006). Methods of forming conductive material silicides by reaction of metal with silicon. U.S. Patent No. 7,026,243. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1735


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