Method of forming MIS capacitor

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Title: Method of forming MIS capacitor
Date: 2006
Citation: Basceri, C., & Derderian, G. J. (2006). Method of forming MIS capacitor. U.S. Patent No. 7,029,985. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1751


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