Methods of depositing materials over substrates, and methods of forming layers over substrates

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Title: Methods of depositing materials over substrates, and methods of forming layers over substrates
Date: 2006
Citation: Sarigiannis, D., Derderian, G. J., & Basceri, C. (2006). Methods of depositing materials over substrates, and methods of forming layers over substrates. U.S. Patent No. 7,048,968. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1755


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