Methods of depositing materials over substrates, and methods of forming layers over substrates

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2006

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Sarigiannis, D., Derderian, G. J., & Basceri, C. (2006). Methods of depositing materials over substrates, and methods of forming layers over substrates. U.S. Patent No. 7,048,968. Washington, DC: U.S. Patent and Trademark Office.

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