Method of providing a structure using self-aligned features

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Title: Method of providing a structure using self-aligned features
Date: 2006
Citation: Chopra, D., Donahoe, K. G., & Basceri, C. (2006). Method of providing a structure using self-aligned features. U.S. Patent No. 7,109,112. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1761


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