Methods of growing epitaxial silicon

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Title: Methods of growing epitaxial silicon
Date: 2006
Citation: Ramaswamy, N., & Basceri, C. (2006). Methods of growing epitaxial silicon. U.S. Patent No. 7,115,489. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1762


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