Atomic layer deposition methods

Show full item record

Title: Atomic layer deposition methods
Date: 2006
Citation: Castovillo, P. J., Basceri, C., Derderian, G. J., & Sandhu, G. S. (2006). Atomic layer deposition methods. U.S. Patent No. 7,150,789. Washington, DC: U.S. Patent and Trademark Office.

Files in this item

Files Size Format View
US_7150789_B2_I.pdf 129.7Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record