Methods for forming a conductive structure using oxygen diffusion through one metal layer to oxidize a second metal layer
Title: | Methods for forming a conductive structure using oxygen diffusion through one metal layer to oxidize a second metal layer |
Date: | 2007 |
Citation: | Basceri, C., & Sandhu, G. (2007). Methods for forming a conductive structure using oxygen diffusion through one metal layer to oxidize a second metal layer. U.S. Patent No. 7,273,791. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1771 |
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