Methods for forming a conductive structure using oxygen diffusion through one metal layer to oxidize a second metal layer

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2007

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Basceri, C., & Sandhu, G. (2007). Methods for forming a conductive structure using oxygen diffusion through one metal layer to oxidize a second metal layer. U.S. Patent No. 7,273,791. Washington, DC: U.S. Patent and Trademark Office.

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