Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device
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2007
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Cross, J. S., Tsukada, M., Horii, Y., Gruverman, A., & Kingon, A. (2007). Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device. U.S. Patent No. 7,241,656. Washington, DC: U.S. Patent and Trademark Office.