Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device
Title: | Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device |
Date: | 2007 |
Citation: | Cross, J. S., Tsukada, M., Horii, Y., Gruverman, A., & Kingon, A. (2007). Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device. U.S. Patent No. 7,241,656. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1775 |
Files in this item
Files | Size | Format | View |
---|---|---|---|
US_7241656_B2_I.pdf | 161.8Kb |
View/ |