Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device
| Title: | Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device |
| Date: | 2007 |
| Citation: | Cross, J. S., Tsukada, M., Horii, Y., Gruverman, A., & Kingon, A. (2007). Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device. U.S. Patent No. 7,241,656. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1775 |
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| US_7241656_B2_I.pdf | 161.8Kb |
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