Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device
| dc.date.accessioned | 2008-10-17T18:56:06Z | |
| dc.date.available | 2008-10-17T18:56:06Z | |
| dc.date.issued | 2007 | |
| dc.identifier.citation | Cross, J. S., Tsukada, M., Horii, Y., Gruverman, A., & Kingon, A. (2007). Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device. U.S. Patent No. 7,241,656. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1775 | |
| dc.format.extent | 165779 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Semiconductor device and its manufacture method, and measurement fixture for the semiconductor device | |
| dc.type | Patent |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
| US_7241656_B2_I.pdf | 161.8Kb |
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