Normal incidence rotating compensator ellipsometer

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Title: Normal incidence rotating compensator ellipsometer
Date: 2007
Citation: Aspnes, D. E. (2007). Normal incidence rotating compensator ellipsometer. U.S. Patent No. 7,173,700. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1778


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