Normal incidence rotating compensator ellipsometer
Title: | Normal incidence rotating compensator ellipsometer |
Date: | 2007 |
Citation: | Aspnes, D. E. (2007). Normal incidence rotating compensator ellipsometer. U.S. Patent No. 7,173,700. Washington, DC: U.S. Patent and Trademark Office. |
URI: | http://www.lib.ncsu.edu/resolver/1840.2/1778 |
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