Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
| Title: | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
| Date: | 2007 |
| Citation: | Beaman, K. L., Doan, T. T., Breiner, L. D., Weimer, R. A., Ping, E. X., Kubista, D. J., Basceri, C., & Zheng, L. A. (2007). Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition. U.S. Patent No. 7,258,892. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1784 |
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