Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
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2007
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Beaman, K. L., Doan, T. T., Breiner, L. D., Weimer, R. A., Ping, E. X., Kubista, D. J., Basceri, C., & Zheng, L. A. (2007). Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition. U.S. Patent No. 7,258,892. Washington, DC: U.S. Patent and Trademark Office.
