Method for binding halide-based contaminants during formation of a titanium-based film
| Title: | Method for binding halide-based contaminants during formation of a titanium-based film |
| Date: | 2007 |
| Citation: | Derderian, G. J., Basceri, C., & Westermoreland, D. L. (2007). Method for binding halide-based contaminants during formation of a titanium-based film. U.S. Patent No. 7,311,942. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1798 |
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