Method of forming a vertical transistor

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Title:	Method of forming a vertical transistor
Date:	2007
Citation:	Ramaswamy, N., Sandhu, G. S., Basceri, C., & Blomiley, E. R. (2007). Method of forming a vertical transistor. U.S. Patent No. 7,276,416. Washington, DC: U.S. Patent and Trademark Office.
URI:	http://www.lib.ncsu.edu/resolver/1840.2/1801



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