Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects
| Title: | Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects |
| Date: | 2007 |
| Citation: | Basceri, C., Sandhu, G. S., & Manning, H. M. (2007). Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects. U.S. Patent No. 7,241,705. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1806 |
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