Deposition methods with time spaced and time abutting precursor pulses
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2007
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Marsh, E., Vaartstra, B., Castrovillo, P. J., Basceri, C., Derderian, G. J., & Sandhu, G. S. (2007). Deposition methods with time spaced and time abutting precursor pulses. U.S. Patent No. 7,271,077. Washington, DC: U.S. Patent and Trademark Office.
