Semiconductor manufacturing apparatus for modifying-in-film stress of thin films, and product formed thereby
| Title: | Semiconductor manufacturing apparatus for modifying-in-film stress of thin films, and product formed thereby |
| Date: | 2008 |
| Citation: | Basceri, C. (2008). Semiconductor manufacturing apparatus for modifying-in-film stress of thin films, and product formed thereby. U.S. Patent No. 7,358,554. Washington, DC: U.S. Patent and Trademark Office. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/1818 |
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