Semiconductor manufacturing apparatus for modifying-in-film stress of thin films, and product formed thereby
| dc.date.accessioned | 2008-10-17T20:43:10Z | |
| dc.date.available | 2008-10-17T20:43:10Z | |
| dc.date.issued | 2008 | |
| dc.identifier.citation | Basceri, C. (2008). Semiconductor manufacturing apparatus for modifying-in-film stress of thin films, and product formed thereby. U.S. Patent No. 7,358,554. Washington, DC: U.S. Patent and Trademark Office. | |
| dc.identifier.uri | http://www.lib.ncsu.edu/resolver/1840.2/1818 | |
| dc.format.extent | 129739 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en | |
| dc.title | Semiconductor manufacturing apparatus for modifying-in-film stress of thin films, and product formed thereby | |
| dc.type | Patent |
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| Files | Size | Format | View |
|---|---|---|---|
| US_7358554_B2_I.pdf | 126.6Kb |
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