Supercritical fluid technology for cleaning processing chambers and systems

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Title: Supercritical fluid technology for cleaning processing chambers and systems
Date: 2008
Citation: Basceri, C., & Sandhu, G. S. (2008). Supercritical fluid technology for cleaning processing chambers and systems. U.S. Patent No. 7,323,064. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1824


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