Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers

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Title: Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
Date: 2008
Citation: Beaman, K. L., Weimer, R. A., Breiner, L. D., Ping, E. X., Doan, T. T., Basceri, C., Kubista, D. J., & Zheng, L. A. (2008). Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers. U.S. Patent No. 7,344,755. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1828


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