Method of forming conductive metal silicides by reaction of metal with silicon

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Title: Method of forming conductive metal silicides by reaction of metal with silicon
Date: 2008
Citation: Basceri, C. (2008). Method of forming conductive metal silicides by reaction of metal with silicon. U.S. Patent No. 7,358,188. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1830


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