Atomic layer deposition methods

Show full item record

Title: Atomic layer deposition methods
Date: 2008
Citation: Sarigiannis, D., Derderian, G. J., Basceri, C., Sandhu, G. S., Gealy, F. D., & Carlson, C. M. (2008). Atomic layer deposition methods. U.S. Patent No. 7,368,382. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1831


Files in this item

Files Size Format View
US_7368382_B2_I.pdf 124.7Kb PDF View/Open

This item appears in the following Collection(s)

Show full item record