Atomic layer deposition methods

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dc.date.accessioned 2008-10-17T21:11:09Z
dc.date.available 2008-10-17T21:11:09Z
dc.date.issued 2008
dc.identifier.citation Sarigiannis, D., Derderian, G. J., Basceri, C., Sandhu, G. S., Gealy, F. D., & Carlson, C. M. (2008). Atomic layer deposition methods. U.S. Patent No. 7,368,382. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1831
dc.format.extent 127696 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Atomic layer deposition methods
dc.type Patent


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