MIS capacitor and method of formation

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Title: MIS capacitor and method of formation
Date: 2008
Citation: Basceri, C., & Derderian, G. J. (2008). MIS capacitor and method of formation. U.S. Patent No. 7,326,984. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1836


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