Dry etching of silicon carbide

No Thumbnail Available

Date

1989

Authors

Advisors

Journal Title

Series/Report No.

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Citation

Palmour, J. W. (1989). Dry etching of silicon carbide. U.S. Patent No. 4865685. Washington, DC: U.S. Patent and Trademark Office.

Degree

Discipline

Collections