Dry etching of silicon carbide

Show simple item record

dc.date.accessioned 2008-10-24T19:29:29Z
dc.date.available 2008-10-24T19:29:29Z
dc.date.issued 1989
dc.identifier.citation Palmour, J. W. (1989). Dry etching of silicon carbide. U.S. Patent No. 4865685. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/1885
dc.format.extent 1777327 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Dry etching of silicon carbide
dc.type Patent


Files in this item

Files Size Format View
Dry_etching_of_silicon_carbide2.pdf 1.694Mb PDF View/Open

This item appears in the following Collection(s)

Show simple item record