Method for forming an oxide-filled trench in silicon carbide

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Title: Method for forming an oxide-filled trench in silicon carbide
Date: 1993
Citation: Baliga, B. J. (1993). Method for forming an oxide-filled trench in silicon carbide. U.S. Patent No. 5270244. Washington, DC: U.S. Patent and Trademark Office.
URI: http://www.lib.ncsu.edu/resolver/1840.2/1912


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