Soft x-ray photoelectron spectroscopy of (HfO2)(x)(SiO2)(1-x) high-k gate-dielectric structures
| Title: | Soft x-ray photoelectron spectroscopy of (HfO2)(x)(SiO2)(1-x) high-k gate-dielectric structures |
| Date: | 2003 |
| Citation: | Ulrich, M. D., Hong, J. G., Rowe, J. E., Lucovsky, G., Chan, A. S. Y., Madey, T. E. (2003). Soft x-ray photoelectron spectroscopy of (HfO2)(x)(SiO2)(1-x) high-k gate-dielectric structures. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 21(4), 1777-1782. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/228 |
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