Spectroscopic study of chemical phase separation in zirconium silicate alloys
| Title: | Spectroscopic study of chemical phase separation in zirconium silicate alloys |
| Date: | 2003 |
| Citation: | Rayner, G. B., Kang, D., & Lucovsky, G. (2003). Spectroscopic study of chemical phase separation in zirconium silicate alloys. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 21(4), 1783-1791. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/229 |
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| Files | Size | Format | View |
|---|---|---|---|
| Lucovsky_2003_Journal_Vac_Sci_Tech_B_1783.pdf | 348.2Kb |
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