Electronic states at the interface of Ti-Si oxide on Si(100)

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Title: Electronic states at the interface of Ti-Si oxide on Si(100)
Date: 2002
Citation: Fulton, C. C., Lucovsky, G., & Nemanich, R. J. (2002). Electronic states at the interface of Ti-Si oxide on Si(100). Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 20(4), 1726-1731.
URI: http://www.lib.ncsu.edu/resolver/1840.2/231


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