http://www.lib.ncsu.edu/resolver/1840.2/233
| Title: | http://www.lib.ncsu.edu/resolver/1840.2/233 |
| Date: | 2002 |
| Citation: | Rayner, G. B., Kang, D., Zhang, Y., & Lucovsky, G. (2002). Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 20(4), 1748-1758. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/234 |
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| Files | Size | Format | View |
|---|---|---|---|
| Lucovsky_2002_Journal_Vac_Sci_Tech_B_1748.pdf | 227.1Kb |
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