http://www.lib.ncsu.edu/resolver/1840.2/233
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2002
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Rayner, G. B., Kang, D., Zhang, Y., & Lucovsky, G. (2002). Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 20(4), 1748-1758.
