Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics

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Title: Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics
Date: 2000
Citation: Lucovsky, G., Yang, H., Niimi, H., Keister, J. W., Rowe, J. E., Thorpe, M. F., & Phillips, J. C. (2000). Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 18(3), 1742-1748.
URI: http://www.lib.ncsu.edu/resolver/1840.2/238


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