Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics
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2000
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Lucovsky, G., Yang, H., Niimi, H., Keister, J. W., Rowe, J. E., Thorpe, M. F., & Phillips, J. C. (2000). Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 18(3), 1742-1748.
