Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics
| Title: | Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics |
| Date: | 2000 |
| Citation: | Lucovsky, G., Yang, H., Niimi, H., Thorpe, M. F., & Phillips, J. C. (2000). Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 18(4), 2179-2186. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/239 |
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