Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics

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dc.date.accessioned 2008-02-22T22:45:24Z
dc.date.available 2008-02-22T22:45:24Z
dc.date.issued 2000
dc.identifier.citation Lucovsky, G., Yang, H., Niimi, H., Thorpe, M. F., & Phillips, J. C. (2000). Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 18(4), 2179-2186.
dc.identifier.uri http://www.lib.ncsu.edu/resolver/1840.2/239
dc.format.extent 163772 bytes
dc.format.mimetype application/pdf
dc.language.iso en
dc.title Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics
dc.type Article


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