Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces

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Title: Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces
Date: 1999
Citation: Wu, Y., Niimi, H., Yang, H., Lucovsky, G., Fair, R. B. (1999). Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 17(4), 1813-1822.
URI: http://www.lib.ncsu.edu/resolver/1840.2/243


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