Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces
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1999
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Wu, Y., Niimi, H., Yang, H., Lucovsky, G., Fair, R. B. (1999). Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 17(4), 1813-1822.
