Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces
| Title: | Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces |
| Date: | 1999 |
| Citation: | Wu, Y., Niimi, H., Yang, H., Lucovsky, G., Fair, R. B. (1999). Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 17(4), 1813-1822. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/243 |
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