Heterointerface dipoles: Applications to (a) Si-SiO2, (b) nitrided Si-N-SiO2, and (c) SiC-SiO2 interfaces

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1998

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Lucovsky, G., Yang, H., & Massoud, H. Z. (1998). Heterointerface dipoles: Applications to (a) Si-SiO2, (b) nitrided Si-N-SiO2, and (c) SiC-SiO2 interfaces. Journal of vacuum science & technology. B, Microelectronics and nanometer structures, 16(4), 2191-2198.

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