American Vacuum Society leadership in electronic materials processing: Past, present, and future
| Title: | American Vacuum Society leadership in electronic materials processing: Past, present, and future |
| Date: | 2003 |
| Citation: | Lucovsky, G., & Rubloff, G. (2003). American Vacuum Society leadership in electronic materials processing: Past, present, and future. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 21(5), S175-S181. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/253 |
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