Physical and electrical properties of noncrystalline Al2O3 prepared by remote plasma enhanced chemical vapor deposition
| Title: | Physical and electrical properties of noncrystalline Al2O3 prepared by remote plasma enhanced chemical vapor deposition |
| Date: | 2001 |
| Citation: | Johnson, R. S., Lucovsky, G., & Baumvol, I. (2001). Physical and electrical properties of noncrystalline Al2O3 prepared by remote plasma enhanced chemical vapor deposition. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 19(4), 1353-1360. |
| URI: | http://www.lib.ncsu.edu/resolver/1840.2/260 |
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