Physical and electrical properties of noncrystalline Al2O3 prepared by remote plasma enhanced chemical vapor deposition
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2001
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Johnson, R. S., Lucovsky, G., & Baumvol, I. (2001). Physical and electrical properties of noncrystalline Al2O3 prepared by remote plasma enhanced chemical vapor deposition. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 19(4), 1353-1360.
